FRP Method for Manufacturing Incombustible Fiberglass Reinforced Plastic for outlet duct and pipe of in factory of manufacturing semiconductor

摘要

The present invention relates to a method for manufacturing incombustible fiberglass reinforced plastic (FRP) having a multi-layered structure for an outlet duct and a pipe in a factory of manufacturing semiconductors. The FRP has an inner corrosion-resisting layer (1) and an incombustible surface layer (2) created by impregnating glass fiber with incombustible matrix resin which is based on a bisphenol type vinyl ester resin having a unsaturated polyester group at an end of an epoxy resin. The incombustible FRP manufactured by the present invention has superior corrosion resistance and mechanical strength, especially incombustibility. Thus, the FRP is a useful material highly suitable for a pipe and an outlet duct in a factory of manufacturing semiconductors, which is a fire prone area due to combustible exhaust gas including perfluorocarbon, combustible gas, purge gas, addition gas, etc.