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FRP Method for Manufacturing Incombustible Fiberglass Reinforced Plastic for outlet duct and pipe of in factory of manufacturing semiconductor

机译:玻璃钢制造半导体工厂出风管玻璃管用不燃性玻璃钢的方法

摘要

The present invention relates to a method for producing an incombustible fiber reinforced plastic (FRP) for an exhaust gas duct and piping in a semiconductor manufacturing plant by impregnating a glass fiber with a nonflammable matrix resin composed of a bisphenol type vinyl ester resin having an unsaturated polyester group at the end of the epoxy . Since the nonflammable fiber-reinforced plastic (FRP) manufactured according to the present invention is excellent in corrosion resistance and mechanical strength, and particularly has a characteristic of showing incombustibility, it is possible to prevent fire due to flammable exhaust gas including perfluorocarbon, combustible gas, purge gas, It is a very suitable and useful material for exhaust ducts and piping of semiconductor manufacturing plants, which are a concern of the invention.
机译:本发明涉及一种通过用不燃性基体树脂浸渍玻璃纤维来制造用于半导体制造工厂中的排气管道和管道的不燃性纤维增强塑料(FRP)的方法,所述不燃性基体树脂由具有不饱和基团的双酚型乙烯基酯树脂组成。环氧末端的聚酯基。由于根据本发明制造的不燃纤维增强塑料(FRP)具有优异的耐腐蚀性和机械强度,并且特别地具有显示不燃性的特性,因此可以防止由于包括全氟化碳,可燃气体在内的可燃气体的燃烧而引起的火灾。它是一种非常合适和有用的材料,用于半导体制造厂的排气管和管道,这是本发明所关注的。

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