首页> 外国专利> FRP Method for Manufacturing Incombustible Fiberglass Reinforced Plastic for outlet duct and pipe of in factory of manufacturing semiconductor

FRP Method for Manufacturing Incombustible Fiberglass Reinforced Plastic for outlet duct and pipe of in factory of manufacturing semiconductor

机译:玻璃钢制造半导体工厂出风管玻璃管用不燃性玻璃钢的方法

摘要

The present invention relates to a method for manufacturing incombustible fiberglass reinforced plastic (FRP) having a duct and a pipe for exhaust gas in a factory of manufacturing semiconductors by impregnating glass fiber with incombustible matrix resin which consists of bisphenol type vinyl ester resin having unsaturated polyester groups at an end of epoxy resin. The incombustible FRP manufactured by the present invention has superior corrosion resistance and mechanical strength, especially incombustibility, so the FRP is a useful material highly suitable for a duct and a pipe for exhaust gas in a factory of manufacturing semiconductors, which is a fire prone area due to combustible exhaust gas including perfluorocarbon, combustible gas, purge gas, added gas, etc.
机译:本发明涉及一种在制造半导体的工厂中通过用不燃性基体树脂浸渍玻璃纤维来制造具有导管和排气用管的不燃性玻璃纤维增​​强塑料(FRP)的方法,该不燃性基体树脂由具有不饱和聚酯的双酚型乙烯基酯树脂组成。在环氧树脂末端的基团。由于本发明制造的不可燃FRP具有优异的耐腐蚀性和机械强度,尤其是不可燃性,因此FRP是非常适合在易燃区域的半导体制造工厂中用于排气管和排气管的有用材料。由于可燃气体的排放,包括全氟化碳,可燃气体,吹扫气,添加气体等。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号