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Photosensitive resin composition, photosensitive sheet, cured film, element, organic EL display device, semiconductor electronic component, semiconductor device and manufacturing method of organic EL display device

机译:光敏树脂组合物,光敏片,固化膜,元件,有机EL显示装置,半导体电子部件,半导体装置以及有机EL显示装置的制造方法

摘要

The present invention provides a highly sensitive photosensitive resin composition having a high residual film ratio after development and high bending resistance in a cured film. (A) an alkali-soluble resin, and (b) a photosensitive compound, wherein the alkali-soluble resin (a) has 95 to 100 mol% as a repeating unit the structure represented by the general formula (1) a) a photosensitive resin composition having an organic group derived from a monoamine or an acid anhydride at least at one end of a polymer molecular chain in an alkali-soluble resin. (In the general formula (1), ROneRepresents a divalent organic group, R2And R3Each independently represent hydrogen or an organic group having 1 to 20 carbon atoms, and XOneAnd X2Each independently represent a linear or branched alkylene group having 1 to 20 carbon atoms, a 1,3-phenylene group or a 1,4-phenylene group, ROne, XOneAnd X2M and n are integers within a range of 0 to 100,000, and m + n 3, respectively, in the plurality of repeating units,
机译:本发明提供了一种高感光度的光敏树脂组合物,其在显影后具有高残留膜比率和在固化膜中具有高抗弯曲性。 (A)一种碱溶性树脂,和(b)一种光敏化合物,其中所述碱溶性树脂(a)具有95至100mol%的通式(1)表示的结构作为重复单元。在碱溶性树脂中,至少在聚合物分子链的一端具有衍生自单胺或酸酐的有机基的树脂组合物。 (在通式(1)中,R 1 表示二价有机基团,R 2 和R 3 分别独立地表示氢或有机基团。具有1至20个碳原子的基团和X One 和X 2 分别独立地表示具有1至20个碳原子的直链或支链亚烷基,即1,3-亚苯基基或1,4-亚苯基,R 一个,X 一个和X 2 M和n为0至0之间的整数在多个重复单元中分别为100,000和m + n 3,

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