Low-temperature spraying device with large area uniform deposition capability

摘要

A low temperature sprayer for coating particles on a substrate includes a nozzle assembly in which a plurality of internal passages are purged from a common outlet. The nozzle assembly includes a particle supplying member interlocked with the inner passage. The particle feed member is caused to flow and accelerate the particles through the inner passages so that the particles are fed from the nozzle assembly through the common outlet in the direction of the substrate to be coated. In addition, each internal passageway includes a laser emitting a laser beam transmitted through the internal passageway. The laser accelerates the coating of the substrate through the particles by heating at least one of the particles and the substrate.