SPRAYING UNIT UNIFORMLY SPRAYING PROCESS GAS ON A SUBSTRATE WITH A PROCESS GAS NOZZLE, A CURTAIN GAS NOZZLE, AND AN EXHAUST GROOVE AND A DEPOSITION DEVICE

摘要

PURPOSE: A spraying unit and a deposition device are provided to prevent deformation of a nozzle body in high temperature by cooling the nozzle body with a cooling flow path, and to form a deposition membrane with a uniform thickness.;CONSTITUTION: A spraying unit(2200) includes a main body, one or more process gas nozzle(2210), a plurality of curtain gas nozzles(2220), and a cooling flow path(2240). The process gas nozzle is formed on the center part of the main body. The curtain gas nozzles are formed on the both sides of the process gas nozzle. An exhaust groove is formed on the exterior of the gas nozzle. The cooling flow path cools the nozzle body.;COPYRIGHT KIPO 2010