Apparatus and method for laser machining transparent workpieces using non-axisymmetric beam spots

摘要

A method of laser processing a transparent workpiece comprises directing a pulsed laser beam output by a beam source through an aspheric optical element positioned offset radially from the beam path to a transparent workpiece to form a pulse laser beam Forming a contour that includes defects that cause induction absorption in the transparent workpiece, wherein a portion of the transparent workpiece produces defects in the transparent workpiece. Part of the pulsed laser beam has a wavelength (?), An effective spot size ( ), And a minimum Rayleigh range ( ) And the minimum Rayleigh range in the cross-section y-direction ( Axis symmetric beam cross-section. In addition, Wow Of the smaller ones , Where F _D is a dimensionless divergence factor that includes a value of 10 or greater.