Apparatus and method for laser machining transparent workpieces using non-axisymmetric beam spots

摘要

A method of laser processing a transparent workpiece comprises a pulsed laser beam directed to the transparent workpiece by directing the pulsed laser beam output by the beam source through the aspherical optical element located radially offset from the beam path to the transparent workpiece. Forming a contour comprising the defect, wherein a portion of the resulting in induced absorption in the transparent workpiece creates a defect in the transparent workpiece. Some of the pulsed laser beams have a wavelength (λ), an effective spot size ( ), And the minimum Rayleigh range in the cross section x-direction ( ) And the minimum Rayleigh range in the cross section y-direction ( A non-axisymmetric beam cross-section including Also, the Wow One of the smaller Larger than where F _D is a dimensionless divergence coefficient comprising a value of 10 or more.