A plate type heater suitable for multiple plain zone

摘要

Disclosed is a plate-shaped heater apparatus suitable for a plurality of planar sections. To this end, the plate-shaped heater apparatus comprises: a plurality of plate-shaped heaters covering the upper part of a chamber divided into a plurality of sections of a substrate processing apparatus, and formed with five floors; a power plug connected to a heating wire of a heating layer disposed in a plate-shaped heater, and having a connection line extended to the outside; a thermocouple connected to the heating wire of the heating layer formed in the plate-shaped heater, and measuring and controlling the temperature of the heating wire; the temperature controller connected to the thermocouple and controlling the temperature of the heating layer of the plate-shaped heater at a preset temperature; and a handle unit disposed on the uppermost part of the plate-shaped heater and used when installing or removing the plate-shaped heater. Accordingly, the temperature of the chamber is constantly maintained, thereby increasing productivity and improving yield of a substrate managing process.