MEMS MEMS vertical pin for probe card with improved stress dispersion

摘要

The present invention relates to a MEMS vertical pin for a probe card with improved stress dispersion, which comprises: a first contact portion protruding to one side; a first bent portion connected to the other end of the first contact portion so that the first contact portion has elastic restoring force, and formed in a shape in which the bend is repeated and vertically continues; and a first area reducing portion in which a part of the first bent portion is removed so that the area of the first bent portion is reduced.