Vertical MEMS Probe Card

摘要

The vertical Vx MEMS Probe Cards now provide a current-carrying capability (CCC) of >1 A per probe in 90-μm-pitch full-grid array configurations.The enhanced CCC makes the probe card more robust to transient high-current events, a benefit that drives higher wafer test-cell uptime and better overall wafer test efficiency. The CCC performance enables customers to shrink IC probe pitches well below today's 130- to 150-μm standard.