Methods and systems for in-line part averaging testing and potential reliability defect detection

摘要

Methods and systems for in-line part average testing and potential reliability defect recognition or detection are disclosed. The inline component averaging testing method includes: performing inline inspection and metrology on a plurality of wafers in a plurality of critical steps during wafer fabrication; Aggregating inspection results obtained from inline inspection and metrology using one or more processors to obtain a plurality of aggregated inspection results for the plurality of wafers; Identifying one or more statistical outliers among the plurality of wafers based at least in part on the plurality of aggregated inspection results obtained for the plurality of wafers; And disqualifying the one or more statistical outliers from entering the supply chain for the downstream manufacturing process, or separating the one or more statistical outliers for further evaluation, testing or repurposing.