Chemical Mechanical Abrasive Slurry for Cobalt Applications

摘要

A slurry for polishing a surface or substrate comprising cobalt. The slurry further comprises anionic and / or cationic surfactants, each of which has a phosphate group, a long chain alkyl group or both. The slurry also includes corrosion inhibitors, abrasives, removal rate enhancers, solvents, pH adjusters, and chelating agents. The pH of the slurry is preferably 8 or more.