SIDE NOZZLE UNIT FOR WAFER RECEIVING CASSETTE OF SIDE STORAGE AND WAFER RECEIVING CASETTE OF SIDE STORAGE INCLUDING SIDE NOZZLE UNIT FOR WAFER RECEIVING CASSETTE OF SIDE STORAGE

摘要

A disclosed side nozzle unit for a wafer receiving cassette of side storage includes a side nozzle body, a side nozzle side gas supply pipe and a plurality of side nozzles. Therefore, through the side nozzle unit for a wafer receiving cassette of side storage, gas is spread through a gas spraying hole in a range to an opening portion for entry and exit of each wafer of the wafer receiving cassette of side storage from an extension line of back surfaces of a supply pipe connecting hole and the gas spraying hole, and flows therein, thereby suppressing vertex formation at the opening portion of the wafer receiving cassette of side storage and preventing fume from flowing backward through the opening portion of the wafer receiving cassette of side storage by the vortex.;COPYRIGHT KIPO 2019