Side wall nozzle unit for wafer seating cassette of side storage and wafer seating cassette of side storage comprising the side wall nozzle unit for wafer seating cassette of side storage

摘要

Since the side nozzle unit for a wafer storage cassette of the disclosed side storage includes a side nozzle body, a side nozzle side gas supply pipe and a plurality of side nozzles, gas is supplied through a side nozzle unit for the wafer storage cassette of the side storage. And as it flows as it diffuses through the gas diffusion hole in a range from an extension line at the rear side of the gas diffusion hole to an opening portion for each wafer entry and exit of the wafer storage cassette of the side storage, at the opening portion of the wafer storage cassette of the side storage. There is an advantage in that vortex formation is suppressed, and thus the phenomenon that fume flows back through the opening portion of the wafer receiving cassette of the side storage by the vortex can be prevented.