Micro rate of rotation sensor and method for operating a micro rate of rotation sensor

摘要

The micro rotation rate sensor according to the present invention includes a substrate 20, a plurality of masses disposed on an XY plane parallel to the substrate 20 and displaceable with respect to the substrate 20, (4, 10) for connecting at least one of said masses to at least one adjacent mass or at least one anchor (2, 13), and a plurality of anchors 20 for sensing the deflection of the masses due to the generated Coriolis force, and drive elements for oscillating at least some of the masses in the X direction to generate a Coriolis force, (X, Y, Z) axis, including the axis 21 of rotation. The masses are subdivided into driving masses (11), XY sensor masses (8), or Z sensor masses (12). The XY sensor masses 8 are connected to the driving masses 11 and the Z sensor masses 12 by springs 10. The connection between the XY sensor masses 8 and the driving masses 11 is such that when the driving masses 11 are driven to drive in the X-direction, the XY sensor masses 8 are connected to the driving masses 11 So as to be oscillated in the X and Y directions. (X, Y, Z) axes having a substrate 2 and driving masses 11, XY sensor masses 8 and Z sensor masses 21, A method of operating a micro turnover sensor, wherein the drive masses (11) are driven by drive elements to oscillate in the X-direction, the XY sensor masses (8) To oscillate in the X and Y directions. When the rotation rate of the substrate 20 occurs with respect to the X-axis or the Y-axis, the XY sensor masses 8 are displaced jointly with respect to the Y-axis or the X-axis, Direction is generated with respect to the Z-direction, the XY sensor masses 8 are rotated about the Z-axis, and the Z-sensor masses 12 are displaced in the substantially X-direction.