Piezoresistive Rotation Angle Sensor Integrated in Micromirror

摘要

A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor signal is the voltage generated by the shear piezoresistance effect. This sensor has the advantage of being a single element which can be included in a torsion bar. The sensor signal is confirmed to be proportional to the mirror rotation. By taking advantage of the crystal orientation dependence, the sensor can be designed to be sensitive to the mirror rotation and insensitive to the shift motion.