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2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

机译：基于压电薄膜铝氮化铝，具有大扫描角度和单片综合角度传感器的2D扫描微镜

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Katja Meinel; Marcel Melzer; Chris Stoeckel; Alexey Shaporin; Roman Forke; Sven Zimmermann; Karla Hiller; Thomas Otto; Harald Kuhn;
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1. AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors [J] . Lei Hongjie, Wen Quan, Yu Fan, Journal of Micromechanics and Microengineering . 2018,第11期

机译：基于ALN薄膜的压电大孔径MEMS扫描微镜与角度传感器集成
2. Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films [J] . Morito Akiyama, Kazuhiko Kano, Akihiko Teshigahara Applied Physicsletters . 2009,第16期

机译：生长温度和scan浓度对氮化铝nitride合金薄膜压电响应的影响
3. A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film [J] . Takayuki Naono, Takamichi Fujii, Masayoshi Esashi, Journal of Micromechanics and Microengineering . 2014,第1期

机译：Nb掺杂PZT薄膜驱动的大扫描角压电MEMS光学扫描仪
4. Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride [C] . Katja Meinel, Chris Stoeckel, Marcel Melzer, International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII . 2019

机译：基于氮化铝薄膜的大扫描角压电扫描微镜
5. Scanning Angle Raman spectroscopy in polymer thin film characterization. [D] . Nguyen, Vy H. T. 2015

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6. FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor [O] . Hongjie Lei, Quan Wen, Fan Yu, 2018

机译：集成了角度传感器的基于FR4的电磁扫描微镜
7. Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments [O] . Morito AKIYAMA, Tatsuo TABARU, Keiko NISHIKUBO, 2010

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8. Robotic Tactile Sensors Fabricated from a Monolithic Silicon Integrated Circuitand a Piezoelectric Polyvinylidene Fluoride Thin Film [R] . Dyson, C. S. 1991

机译：由单片硅集成电路和压电聚偏二氟乙烯薄膜制成的机器人触觉传感器

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

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