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Ag-coated Cu pillar bonding structure and bonding method using the Ag-coated Cu pillars

机译:涂银的铜柱的结合结构及使用该涂银的铜柱的结合方法

摘要

The present invention relates to a bonding structure using a silver coated copper filament and a bonding method using the same. In order to achieve the above object, the present invention provides a bonding structure using a silver coated copper filament comprising a copper filament having irregularities on its surface and a silver coating layer formed on the copper filament Wherein the silver coating layer is formed so as to be in situ transferred in the form of a nodule in the process of heating the silver coating layer to a specific temperature or higher, thereby joining the members to be bonded. And a joining method using the joining structure. As a result, it is possible to finely realize the silver-coated copper filament structure and it can be applied to ultrafine pitch bonding without forming a molten part in the bonding process, and bonding can be performed even at a low bonding pressure, A structure can be formed, and a junction structure excellent in electrical conductivity and thermal conductivity can be provided while having excellent high-temperature reliability.
机译:本发明涉及一种使用涂银铜丝的接合结构及其使用方法。为了实现上述目的,本发明提供了一种结合结构,该结合结构使用涂银的铜丝,其包括在其表面上具有凹凸的铜丝和在该铜丝上形成的银涂层,其中形成了银涂层,从而在将银涂层加热到特定温度或更高的温度的过程中,以结节的形式原位转移,从而将待结合的构件结合在一起。以及使用接合结构的接合方法。结果,可以精细地实现镀银的铜丝结构,并且可以在接合过程中不形成熔融部分的情况下应用于超细间距接合,并且即使在低接合压力下也可以进行接合。可以形成,并且可以提供具有优异的高温可靠性的同时具有优异的导电性和导热性的结结构。

著录项

  • 公开/公告号KR101971493B1

    专利类型

  • 公开/公告日2019-04-23

    原文格式PDF

  • 申请/专利权人 서울과학기술대학교 산학협력단;

    申请/专利号KR20170127504

  • 发明设计人 이종현;최은별;

    申请日2017-09-29

  • 分类号H01L23/532;H01L21/027;H01L21/768;H01L23;H01L23/48;H01L25/07;

  • 国家 KR

  • 入库时间 2022-08-21 11:48:43

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