THE PRESSURE SENSOR INCLUDING LATERALLY ARRANGED ELECTRODES ON A COPLANAR SURFACE AND METHOD OF FABRICATING THE SAME AND THE MULTIAXIAL TACTILE SENSOR USING THE PRESSURE SENSOR

摘要

There is provided a pressure sensor including horizontally arranged electrodes on the same plane and a method of manufacturing the same. Wherein the pressure sensor comprises: a substrate having an upper surface formed in a plurality of projections; A first electrode formed on one side of an upper surface of the substrate; A second electrode formed on the other side of the upper surface of the substrate so as to be spaced apart from the first electrode; And a dielectric material layer formed on an upper surface of the substrate, the dielectric material layer including nanoparticles filling a space between the first electrode and the second electrode, wherein a pressure applied in a direction perpendicular to the upper surface of the substrate The dielectric constant of the dielectric material layer is increased and the magnitude of the pressure is sensed by detecting an increase in capacitance value formed between the first electrode and the second electrode in accordance with the increase of the dielectric constant.