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Nickel-tin micro bump structures and methods of making the same

机译:镍锡微凸块结构及其制造方法

摘要

Techniques and mechanisms for providing effective surface level microbuckle connectivity on a package substrate of an integrated circuit. In one embodiment, different metals are variously electroplated to form a microbump that extends through a surface level dielectric of a substrate to a seed layer comprising copper. The microbump includes nickel and tin, with the nickel helping copper to reduce absorption of the seed layer. In another embodiment, the microbump has a mass fraction of tin or a mass fraction of nickel that is different in different regions along a height of the microbump.
机译:用于在集成电路的封装衬底上提供有效的表面水平微扣连接的技术和机制。在一实施例中,不同的金属被不同地电镀以形成微凸块,该微凸块延伸穿过衬底的表面水平电介质到达包含铜的种子层。微凸点包括镍和锡,镍有助于铜减少种子层的吸收。在另一个实施例中,微型凸块具有沿着微型凸块的高度在不同区域中不同的锡的质量分数或镍的质量分数。

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