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Nickel-tin micro bump structures and methods of making the same
Nickel-tin micro bump structures and methods of making the same
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机译:镍锡微凸块结构及其制造方法
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摘要
Techniques and mechanisms for providing effective surface level microbuckle connectivity on a package substrate of an integrated circuit. In one embodiment, different metals are variously electroplated to form a microbump that extends through a surface level dielectric of a substrate to a seed layer comprising copper. The microbump includes nickel and tin, with the nickel helping copper to reduce absorption of the seed layer. In another embodiment, the microbump has a mass fraction of tin or a mass fraction of nickel that is different in different regions along a height of the microbump.
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