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Microstructure and Mechanical Properties of Sn-0.7Cu Flip Chip Solder Bumps Using Stencil Printing Method

机译:模版印刷法Sn-0.7Cu倒装焊锡凸块的组织和力学性能

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摘要

The interfacial microstructure of Sn-0.7Cu solder with ENIG (electroless Ni/immersion Au) was studied using scanning electron microscopy (SEM), electron probe micro analyzer (EPMA) and transmission electron microscopy (TEM). (Cu,Ni)_6Sn_5 intermetallic compound (IMC) layer was formed at the interface between the solder and Ni-P under bump metallurgy (UBM) upon reflow. The thickness of the (Cu,Ni)_6Sn_5 IMC layer increased with isothermal aging time. Two distinctive layers, P-rich and Ni-Sn-P, were additionally found from TEM observation. Analytical studies using energy dispersive spectrometer (EDS) equipped in TEM revealed that the composition of the P-rich layer is close to that of a mixture of Ni_3P and Ni, while that of the Ni-Sn-P layer is analogous to the P-rich layer but containing a small amount of Sn in it. The shear force of the joints decreased during isothermal aging. The decrease of the shear force should be mainly due to the microstructural degradation within the solder.
机译:利用扫描电子显微镜(SEM),电子探针显微分析仪(EPMA)和透射电子显微镜(TEM)研究了Sn-0.7Cu焊料与ENIG(化学镍/浸金)的界面微观结构。回流时,在凸块冶金(UBM)下,在焊料与Ni-P之间的界面处形成(Cu,Ni)_6Sn_5金属间化合物(IMC)层。 (Cu,Ni)_6Sn_5 IMC层的厚度随着等温时效时间的增加而增加。通过TEM观察还发现了两个不同的层,即富P层和Ni-Sn-P层。使用配备在TEM中的能量色散光谱仪(EDS)进行的分析研究表明,富P层的成分接近Ni_3P和Ni混合物的成分,而Ni-Sn-P层的成分类似于P-富集层,但其中包含少量Sn。在等温时效过程中,接头的剪切力降低。剪切力的降低应主要归因于焊料内的微观结构退化。

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