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首页> 外文期刊>Microelectronics & Reliability >Microstructure and reliability of hybrid interconnects by Au stud bump with Sn-0.7Cu solder for flip chip power device packaging
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Microstructure and reliability of hybrid interconnects by Au stud bump with Sn-0.7Cu solder for flip chip power device packaging

机译:金钉凸点与Sn-0.7Cu焊料用于倒装芯片功率器件封装的混合互连的微结构和可靠性

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摘要

With miniaturization of the interconnect solder bumps, high current density causes serious reliability issues (stress, electromigration etc.) in electronic packages. Through Au stud bumping on the chips and following re flow of solder to produce hybrid interconnects, the eletromigration resistance may be improved by the intermetallics formed inside them due to their barrier effects on the atoms migration. Here, microstructures and reliabilities of Au stud with serial amounts of Sn-0.7Cu solder paste were studied through controlling size of stencil printing aperture. After reflow, AuSn, AuSn2 and AuSn4 formed from the surface of Au stud bump to the solder. A layer of (Cu,Au)(6)Sn-5 with thickness of 3 mu m existed at the interface near the Cu substrate with a scallop shape similar to Cu6Sn5. The fraction of intermetallics to the mixed joints varied with the solder amount Shear strength decreased slightly when comparing with the sole solder joint due to large amounts of brittle intermetallics. Thermal aging resulted in many Kirkendall voids generated at the interfaces of Au stud and the solder, which further decreased the shear strength. The effect of solder amount on microstructural evolution and fracture modes was discussed. The hybrid interconnects showed a good electromigration resistance. (C) 2016 Elsevier Ltd. All rights reserved.
机译:随着互连焊料凸块的小型化,高电流密度导致电子封装中严重的可靠性问题(应力,电迁移等)。通过金钉在芯片上的隆起以及焊料的回流以产生混合互连,由于它们对原子迁移的阻挡作用,可以通过在它们内部形成的金属间化合物来提高耐电迁移性。在此,通过控制模版印刷孔的尺寸,研究了含一定量Sn-0.7Cu锡膏的Au螺柱的微观结构和可靠性。回流后,从Au柱形凸块的表面到焊料形成AuSn,AuSn2和AuSn4。在Cu基板附近的扇贝形类似于Cu 6 Sn 5的界面处存在厚度为3μm的(Cu,Au)(6)Sn-5层。金属间化合物占混合接头的比例随焊料量的变化而变化,与单独的焊接头相比,由于大量的金属间化合物脆性,剪切强度略有下降。热老化导致在Au螺柱和焊料的界面处产生许多Kirkendall空隙,从而进一步降低了剪切强度。讨论了焊料量对显微组织演变和断裂模式的影响。混合互连显示出良好的抗电迁移性。 (C)2016 Elsevier Ltd.保留所有权利。

著录项

  • 来源
    《Microelectronics & Reliability》 |2016年第11期|134-142|共9页
  • 作者

    Ji Hongjun; Wang Jiao; Li Mingyu;

  • 作者单位

    Shenzhen Univ Town, Harbin Inst Technol, Shenzhen Grad Sch, State Key Lab Adv Welding & Joining, HIT Campus, Shenzhen 518055, Peoples R China;

    Shenzhen Univ Town, Harbin Inst Technol, Shenzhen Grad Sch, State Key Lab Adv Welding & Joining, HIT Campus, Shenzhen 518055, Peoples R China;

    Shenzhen Univ Town, Harbin Inst Technol, Shenzhen Grad Sch, State Key Lab Adv Welding & Joining, HIT Campus, Shenzhen 518055, Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Au stud; Au-Sn compounds; Interconnections; Electromigration; Reliability; Power electronics;

    机译:金钉;金锡化合物;互连;电迁移;可靠性;电力电子;

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