Development of Open-Tubular-Type Micro Gas Chromatography Column with Bump Structures

摘要

Gas chromatography (GC) is the chemical analysis technique most widely used to separate and identify gas components, and it has been extensively applied in various gas analysis fields such as non-invasive medical diagnoses, indoor air quality monitoring, and outdoor environmental monitoring. Micro-electro-mechanical systems (MEMS)-based GC columns are essential for miniaturizing an integrated gas analysis system (Micro GC system). This study reports an open-tubular-type micro GC (μ-GC) column with internal bump structures (bump structure μ-GC column) that substantially increase the interaction between the gas mixture and a stationary phase. The developed bump structure μ-GC column, which was fabricated on a 2 cm × 2 cm μ-GC chip and coated with a non-polar stationary phase, is 1.5 m-long, 150 μm-wide, and 400 μm-deep. It has an internal microfluidic channel in which the bumps, which are 150 μm diameter half-circles, are alternatingly disposed to face each other on the surface of the microchannel. The fabricated bump structure μ-GC column yielded a height-equivalent-to-a-theoretical-plate (HETP) of 0.009 cm (11,110 plates/m) at an optimal carrier gas velocity of 17 cm/s. The mechanically robust bump structure μ-GC column proposed in this study achieved higher separation efficiency than a commercially available GC column and a typical μ-GC column with internal post structures classified as a semi-packed-type column. The experimental results demonstrate that the developed bump structure μ-GC column can separate a gas mixture completely, with excellent separation resolution for formaldehyde, benzene, toluene, ethylbenzene, and xylene mixture, under programmed operating temperatures.