微型填充式气相色谱柱的制备

摘要

为了分离永久性气体及低碳轻化合物，基于 MEMS 技术，研究制备了一种微型填充式的气相色谱柱。为了增加色谱柱的长度以及深宽比，色谱柱的沟道制备采用了激光刻蚀技术，这种技术可以方便的在玻璃基底上刻蚀出深沟道，这是其他化学腐蚀技术无法比拟的。研制的色谱柱其沟道横截面为1.2 mm（深度）×0.6 mm（宽度），深宽比为2∶1。实验结果表明，这种微型填充柱，具有较大的样品容量，能很好的实现 CO 和 SO2的分离。%In order to separate the permanent gases from low carbon hydrocarbons,a gas chromatography (GC)column packed with porapak Q as stationary phase was fabricated based on MEMS technology.In this work,the channels on the glass wafer and the silicon wafer were fabricated by a laser etching technology (LET).LET is an effective method to etch a deep channels on the glass wafer as well as on the silicon wafer,so the depth of the channels can be substantially increased by bonding the channels on the silicon together with the channels on the glass wafer.The fabricated column with a rectangular cross section of 1.2 mm (depth)×0.6 mm (width)has a large aspect ratio of 2∶1,which improves the resolution of the column.The experiment shows that the fabricated column demonstrated large sample capacity and completely separated the permanent gases CO and SO2 from low hydrocarbons.