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IMPROVED APPLICATION OF MODULATING SUPPLIES IN A PLASMA PROCESSING SYSTEM

机译:等离子体处理系统中调制用品的改进应用

摘要

Plasma processing systems and methods are disclosed. The method may include modulating plasma properties with a modulating supply where the modulation of the plasma properties has a repetition period, T. A waveform with the repetition period T is characterized to produce a waveform dataset, which includes at least one of information about the modulation of the plasma or a desired waveform of a piece of equipment connected to the plasma processing system. The waveform dataset is sent to at least one piece of equipment connected to the plasma system and a synchronization signal is sent with a synchronization signal repetition period that is an integer multiple of T to the at least one piece of equipment connected to the plasma system.
机译:公开了等离子体处理系统和方法。该方法可以包括利用调制电源来调制等离子体特性,其中等离子体特性的调制具有重复周期T。表征具有重复周期T的波形以产生波形数据集,该波形数据集包括关于调制的信息中的至少一个等离子体或连接到等离子体处理系统的设备的所需波形的变化。波形数据集被发送到连接到等离子体系统的至少一台设备,并且同步信号以为T的整数倍的同步信号重复周期被发送到连接到等离子体系统的至少一台设备。

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