MEMS-BASED NANOINDENTATION FORCE SENSOR WITH ELECTRO-THERMAL TIP HEATING

摘要

For high temperature nanoindentation a MEMS microforce sensor (1) for determining a mechanical property of a sample (11) by sensing a deflection and measuring a force is proposed. The proposed MEMS microforce sensor (1) comprises at least:a cold movable body (7), a heatable movable body (2), a heating resistor (12) and capacitor electrodes (10). The cold movable body (7) and the heatable movable body (2) are mechanically connected by at least one bridge (8) and the capacitor electrodes (10) are measuring a force applied on the sample (11) by sensing the deflection of the cold movable body (7) relative to the outer frame (6) by a change of electrical capacitance.