首页>
外国专利>
Force sensor with MEMS-based device and force touching member
Force sensor with MEMS-based device and force touching member
展开▼
机译:用基于MEMS的装置和力触摸构件力传感器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A force sensor includes a package substrate, a MEMS-based device, a package body and a force touching member. The MEMS-based device is disposed on the package substrate and electrically connected with the package substrate. The package body encapsulates the MEMS-based device. The force touching member including a rod is disposed on the package body and corresponding to the MEMS-based device. The force sensor allows a greater assembly tolerance.
展开▼