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MEMS-BASED NANOINDENTATION FORCE SENSOR WITH ELECTRO-THERMAL TIP HEATING
MEMS-BASED NANOINDENTATION FORCE SENSOR WITH ELECTRO-THERMAL TIP HEATING
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机译:带热电烙铁头加热的基于MEMS的纳米力传感器
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摘要
A MEMS microforce sensor for high temperature nanoindentation is used for determining a mechanical property of a sample by sensing a deflection and measuring a force. The MEMS microforce sensor includes at least a cold movable body, a heatable movable body, a heating resistor and capacitor electrodes. The cold movable body and the heatable movable body are mechanically connected by at least one bridge and the capacitor electrodes measure a force applied on the sample by sensing the deflection of the cold movable body relative to the outer frame by a change of electrical capacitance.
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