Board inspection equipment, board inspection methods, and programs

摘要

PROBLEM TO BE SOLVED: To provide a technique for realizing quick and accurate inspection of a substrate product. A substrate inspection device 10 includes an image acquisition unit 110 and an abnormality determination unit 120. The image acquisition unit 110 acquires a plurality of images generated by photographing the substrate under different conditions. The abnormality determination unit 120 determines the presence or absence of an abnormality in the substrate by processing a plurality of images acquired by the image acquisition unit 110 using the classifier 122 generated by machine learning. [Selection diagram] Fig. 1