Board inspection equipment, board processing equipment, board inspection methods, and computer-readable recording media

摘要

PROBLEM TO BE SOLVED: To more reliably detect an edge to be inspected from a plurality of edges from image data. SOLUTION: A substrate inspection apparatus is provided in a storage unit and a storage unit configured to store inspection image data obtained from an captured image of a peripheral portion of a substrate on which a plurality of coating films are formed and an inspection recipe. An edge detection unit configured to detect the target edge, which is the edge of the coating to be inspected, among a plurality of coatings, based on the inspection image data stored in the storage unit using the stored inspection recipe. To be equipped. Each edge of the coating extends along the periphery of the substrate. The inspection recipe is composed of a combination of a plurality of parameters in which one option is specified from a plurality of options. [Selection diagram] FIG. 17