Integrated optical probe card and system for batch testing of optical MEMS structures with in-plane optical axes using micro-optical bench components

摘要

Aspects of the present disclosure relate to integrated optical probe cards and systems for performing wafer testing of optical microelectromechanical system (MEMS) structures with in-plane optical axes. On-wafer optical screening of optical MEMS structures allows out-of-plane directions perpendicular to the in-plane optical axis and in-plane parallel to the in-plane optical axis to enable testing of the optical MEMS structure using vertical injection of light. It may be implemented utilizing one or more micro-optical bench components for redirecting light to and from directions. [Selection diagram] Figure 2