Evolved gas analysis method and evolved gas analyzer

摘要

Disclosed herein is a method for analyzing evolved gas and an evolved gas analyzer, the apparatus including: a sample holder; a heating unit evolving a gas component by heating the sample; an ion source generating ions by ionizing the gas component evolved by the heating unit; a mass spectrometer detecting the gas component by applying mass spectrometry to the ions; and a gas channel through which mixed gas of the gas component and carrier gas carrying the gas component to the mass spectrometer flows, the method including: operating a discharged flow rate controlling process of controlling a flow rate of the mixed gas discharged to outside; operating a sample holder cooling process of cooling the sample holder by bringing the sample holder into contact with a cooling unit; and operating a correction process by using a reference sample including the gas component as a measurement target and including: correcting a mass spectrum position; calculating a sensitivity correction factor Cs=Ss/S; and calculating a heating correction factor H=t/ts.