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Raw material particles for growing silicon carbide, method for producing raw material particles for growing silicon carbide, and method for producing single crystal silicon carbide

机译:用于生长碳化硅的原材料颗粒,用于生长碳化硅的原材料颗粒的制造方法以及用于制造单晶碳化硅的方法

摘要

PROBLEM TO BE SOLVED: To obtain raw material grains for silicon carbide growth capable of generating a silicon carbide single crystal, while adjusting a Si/C ratio.SOLUTION: Raw material grains for silicon carbide growth in one embodiment are raw material grains for silicon carbide growth for generating a silicon carbide single crystal by recrystallizing sublimation gas on a seed crystal, in which at least a part of a surface of each grain body is coated with a coating layer comprising carbon.SELECTED DRAWING: Figure 1
机译:解决的问题:获得能够在调节Si / C比的同时生成碳化硅单晶的碳化硅生长的原料晶粒。解决方案:在一个实施例中,碳化硅生长的原料晶粒是碳化硅的原材料晶粒。通过在晶种上重结晶升华气体来生成碳化硅单晶的生长过程,其中每个晶粒的至少一部分表面至少覆盖了一层含碳涂层。图1

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