Thin-film solar cell processing apparatus and thin-film solar cell processing method

摘要

PROBLEM TO BE SOLVED: To provide a processing device for a thin-film solar battery and a processing method for a thin-film solar battery that contribute to shorten a time required for forming scribe lines.SOLUTION: A processing device for a thin-film solar battery comprises: a stage for placing a substrate 10 on which an intermediate layer 23 is formed; a sharp tool for forming scribe lines 30 on the intermediate layer 23; a head for pressing the sharp tool against the intermediate layer 23; scanning means for scanning the sharp tool by moving the head relatively to the stage; and a control device that controls operations of the head and the scanning means. The control device forms first scribe lines 31 that are a part of the scribe lines 30 by scanning the sharp tool pressed against the intermediate layer 23 in a first direction, and forms second scribe lines 32 that are a part of the scribe lines 30 by scanning the sharp tool in a second direction opposite to the first direction while maintaining a state where the sharp tool is pressed after the first scribe lines 31 are formed.SELECTED DRAWING: Figure 4