Blasting method and apparatus having abrasive recovery system, processing method of thin-film solar cell panel, and thin-film solar cell panel processed by the method

摘要

Particularly, a thin-film solar cell panel or the like is processed without necessity of attaching and detaching of mask and washing steps with respect to a workpiece in a fine blasting employing a fine abrasive.;A negative pressure space (20) and an opposing negative pressure space (40) having openings (22, 42) are opposed by being spaced at a movement allowable interval of the workpiece such as a thin-film solar cell panel or the like and so as to face one side edge in the same direction as a moving direction of the workpiece. Further, a fine abrasive is injected while relatively moving the workpiece in a moving direction (T) with respect to a blast gun (30) in which an injection hole (31) is disposed within the negative pressure space (20), and the fine abrasive injected into the negative pressure space (20) and/or the opposing negative pressure space (40) and a cut and removed cut scrap such as a thin film layer or the like are sucked and recovered through the intermediary of suction devices (21a, 21b) and/or an opposing suction device (41) respectively communicating with the spaces (20) and/or (40).