An assembly for raising or lowering the carrier, a device for transporting the carrier in a vacuum chamber, and a method for raising or lowering the carrier.

摘要

An assembly (100) for lifting or lowering a carrier (10) in a vacuum chamber is provided. The assembly (100) includes a carrier support (20) that is movable in an upward or downward direction, and a holding device (30) configured to contactlessly hold an upper portion of the carrier during the upward or downward movement of the carrier. Further, an apparatus for transportation of a carrier in a vacuum chamber is described which includes an assembly for lifting or lowering of a carrier. Further, a method for lifting or lowering a carrier in a vacuum chamber is described.