首页> 外国专利> COMPONENT MOUNTING SYSTEM, SUBSTRATE BONDING SYSTEM, COMPONENT MOUNTING METHOD, AND SUBSTRATE BONDING METHOD

COMPONENT MOUNTING SYSTEM, SUBSTRATE BONDING SYSTEM, COMPONENT MOUNTING METHOD, AND SUBSTRATE BONDING METHOD

机译:组件安装系统,基板粘接系统,组件安装方法和基板粘接方法

摘要

To provide a component mounting system, a substrate bonding system, a component mounting method and a substrate bonding method, in which the occurrence of poor bonding is suppressed.SOLUTION: A chip mounting system 1 includes: a stage 31 for holding a substrate WT; a head 33H for holding a chip CP; a chip humidity adjustment section for adjusting the humidity of a chip CP bonding surface CPf by cooling the chip CP, the chip humidity adjustment section being provided in the head 33H; a head drive section 36 which, while the humidity of the chip CP bonding surface CPT is maintained at a humidity within a preset reference humidity range by the chip humidity adjustment section, moves the head 33H closer to the stage 31 to bring the chip CP bonding surface CPf into contact with a mounting face WTf of the substrate WT and mounts the chip CP on the mounting face WTf of the substrate WT.SELECTED DRAWING: Figure 3
机译:为了提供一种部件安装系统,基板接合系统,部件安装方法和基板接合方法,其中抑制了不良接合的发生。解决方案:芯片安装系统1包括:用于保持基板WT的台架31;以及用于保持基板WT的台架31。用于保持芯片CP的头33H;芯片湿度调节部设置在头部33H上,该芯片湿度调节部用于通过冷却芯片CP来调节芯片CP接合面CPf的湿度。头驱动部36,在通过芯片湿度调节部将芯片CP接合面CPT的湿度保持在预定的基准湿度范围内的湿度的同时,使头33H靠近工作台31以使芯片CP接合表面CPf与衬底WT的安装面WTf接触,并将芯片CP安装在衬底WT的安装面WTf上。图3

著录项

  • 公开/公告号JP2019204832A

    专利类型

  • 公开/公告日2019-11-28

    原文格式PDF

  • 申请/专利权人 BONDTECH INC;

    申请/专利号JP20180097628

  • 发明设计人 YAMAUCHI AKIRA;

    申请日2018-05-22

  • 分类号H01L21/60;H01L21/677;H01L21/683;

  • 国家 JP

  • 入库时间 2022-08-21 11:32:39

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