Heating member, electrostatic chuck, and ceramic heater

摘要

A heating member includes a ceramic substrate having a structure in which a plurality of ceramic layers are laminated together; a resistance heat-generating element embedded in the ceramic substrate; an electricity supply element disposed on a surface of the ceramic substrate; and an electricity supply path embedded in the ceramic substrate and electrically connecting the resistance heat-generating element and the electricity supply element. The electricity supply path includes a plurality of conductive layers disposed along the planar direction of the ceramic layers at different positions in the thickness direction of the ceramic substrate, and a plurality of vias disposed along the thickness direction of the ceramic substrate. When the plurality of conductive layers are viewed from the thickness direction, their outer edges are positionally offset from one another.