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Via rail solution for high power electromigration

机译:通过轨道解决方案实现大功率电迁移

摘要

The present disclosure relates to an integrated circuit having a via rail that prevents reliability concerns such as electro-migration. In some embodiments, the integrated circuit has a first plurality of conductive contacts arranged over a semiconductor substrate. A first metal interconnect wire is arranged over the first plurality of conductive contacts, and a second metal interconnect wire is arranged over the first metal interconnect wire. A via rail is arranged over the first metal interconnect wire and electrically couples the first metal interconnect wire and the second metal interconnect wire. The via rail has a length that continuously extends over two or more of the plurality of conductive contacts. The length of via rail provides for an increased cross-sectional area both between the first metal interconnect wire and the second metal interconnect wire and along a length of the via rail, thereby mitigating electro-migration within the integrated circuit.
机译:本公开涉及一种具有通孔的集成电路,该通孔防止诸如电迁移之类的可靠性问题。在一些实施例中,集成电路具有布置在半导体衬底上方的第一多个导电触点。第一金属互连线布置在第一多个导电触点上方,并且第二金属互连线布置在第一金属互连线上方。通孔轨道布置在第一金属互连线上,并且将第一金属互连线和第二金属互连线电耦合。通孔轨具有在多个导电触点中的两个或更多个上连续延伸的长度。通孔轨道的长度在第一金属互连线和第二金属互连线之间以及沿着通孔轨道的长度都提供了增加的横截面面积,从而减轻了集成电路内的电迁移。

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