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Optical sensor system with spectral analysis arrangement detecting a periodicity in a spectral response of a fabry-perot structure

机译:具有光谱分析装置的光学传感器系统,可检测法布里-珀罗结构的光谱响应中的周期性

摘要

An optical sensor system includes an optical sensor arrangement that includes a Fabry-Perot structure having two reflective surfaces spaced apart at a distance from each other. A spectral acquisition arrangement acquires successive spectral responses from the optical sensor arrangement during successive time intervals. A spectral analysis arrangement detects a periodicity in at least one of the successive spectral responses that have been acquired. The spectral analysis arrangement further detects a phase evolution of the periodicity throughout the successive spectral responses. The phase evolution of the periodicity provides a relatively precise measurement of a variation in an optical path length between the two reflective surfaces of the Fabry-Perot structure. A variation in a physical quantity can cause the variation in the optical path length. Accordingly, a relatively precise measurement of the physical quantity can be achieved.
机译:光学传感器系统包括光学传感器装置,该光学传感器装置包括具有两个反射面彼此隔开一定距离的法布里-珀罗结构。光谱采集装置在连续的时间间隔期间从光学传感器装置采集连续的光谱响应。光谱分析装置检测已采集的至少一个连续光谱响应中的周期性。频谱分析装置还检测整个连续频谱响应中周期性的相位演化。周期性的相位演化提供了Fabry-Perot结构的两个反射面之间光程长度变化的相对精确测量。物理量的变化会引起光路长度的变化。因此,可以实现相对精确的物理量测量。

著录项

  • 公开/公告号US10488255B2

    专利类型

  • 公开/公告日2019-11-26

    原文格式PDF

  • 申请/专利权人 OPTICS11;

    申请/专利号US201615773108

  • 发明设计人 GRZEGORZ GRUCA;NIEK RIJNVELD;

    申请日2016-11-07

  • 分类号G01J3/26;G01L1/24;G01J3/02;

  • 国家 US

  • 入库时间 2022-08-21 11:27:11

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