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Optical arrangement for a spectral analysis system, method for its production and spectral analysis system

机译:光谱分析系统的光学装置,其制造方法和光谱分析系统

摘要

An optical arrangement for a spectral analysis system (20), comprising: a diffraction grating (15) movably arranged in a frame (17), a carrier substrate (1) on which the frame (17) with the diffraction grating (15) is arranged, wherein the carrier substrate (1) has a support (8) for the frame (17) on which the frame (17) in a support position inclined relative to a base surface (9) of the carrier substrate (1) is arranged so that the diffraction grating (15) arranged in the frame (17) is inclined in a basic position relative to the base surface (9) of the carrier substrate (1).
机译:一种用于光谱分析系统(20)的光学装置,包括:可移动地布置在框架(17)中的衍射光栅(15),其上具有衍射光栅(15)的框架(17)的载体基板(1)。布置,其中,载体基板(1)具有用于框架(17)的支撑件(8),在该支撑位置上相对于载体基板(1)的底面(9)倾斜的框架(17)布置在框架上因此,布置在框架(17)中的衍射光栅(15)相对于载体基板(1)的底表面(9)在基本位置上倾斜。

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