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Optical arrangement for a spectral analysis system, method for its production and spectral analysis system
Optical arrangement for a spectral analysis system, method for its production and spectral analysis system
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机译:光谱分析系统的光学装置,其制造方法和光谱分析系统
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摘要
An optical arrangement for a spectral analysis system (20), comprising: a diffraction grating (15) movably arranged in a frame (17), a carrier substrate (1) on which the frame (17) with the diffraction grating (15) is arranged, wherein the carrier substrate (1) has a support (8) for the frame (17) on which the frame (17) in a support position inclined relative to a base surface (9) of the carrier substrate (1) is arranged so that the diffraction grating (15) arranged in the frame (17) is inclined in a basic position relative to the base surface (9) of the carrier substrate (1).
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