Optical arrangement for a spectral analysis system, method for its production and spectrally analyzing system

摘要

It is an optical arrangement for a spectral analysis system (20), comprising a diffraction grating (15), the movable in a frame (17) is arranged, and a carrier substrate (1), on which the frame (17) with the diffraction grating (15) is arranged, wherein the carrier substrate (1) a support (8) for the frame (17) on which the frame (17) in a relative to a base (9) of the carrier substrate (1) is arranged inclined support position, so that the in the frame (17) a diffraction grating (15) arranged in a basic position to the base surface (9) of the carrier substrate (1) is inclined. Furthermore, a spectral analysis system (20) with the optical arrangement and a method for the preparation of the optical arrangement.