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Trench capacitor layout structure and method of forming same background
Trench capacitor layout structure and method of forming same background
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机译:沟槽电容器布局结构及其形成背景的方法
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摘要
A semiconductor structure includes a substrate having a trench array therein. The trench array includes a plurality of outer trenches adjacent to and extending along a periphery of the trench array and a plurality of inner trenches. Each of the plurality of outer trenches has a width greater than a width of each of the plurality of inner trenches. A capacitor material stack over the trench array.
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