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SILICON PHOTONICS BASED FIBER COUPLER

机译:基于硅光子学的光纤耦合器

摘要

A silicon-based edge coupler for coupling a fiber with a waveguide includes a cantilever member being partially suspended with its anchored end coupled to a silicon photonics die in a first part of a silicon substrate and a free end terminated near an edge region separating a second part of the silicon substrate from the first part. The edge coupler further includes a mechanical stopper formed at the edge region with a gap distance ahead of the free end of the cantilever member. Additionally, a V-groove is formed in the second part of the silicon substrate characterized by a top opening and a bottom plane symmetrically connected by two sloped side walls along a fixed Si-crystallography angle. The V-groove is configured to support a fiber with an end facet being pushed against the mechanical stopper and a core center being aligned with the free end of the cantilever member.
机译:用于将光纤与波导耦合的基于硅的边缘耦合器包括悬臂部件,该悬臂部件被部分地悬置,其锚固端耦合至硅衬底的第一部分中的硅光子管芯,而自由端终止于在将第二衬底分开的边缘区域附近从第一部分开始的硅衬底的一部分。边缘联接器还包括机械止动器,该机械止动器在边缘区域处形成,该机械止动器在悬臂构件的自由端之前具有间隙距离。另外,在硅衬底的第二部分中形成V形槽,其特征在于顶部开口和底部平面由两个倾斜的侧壁沿着固定的Si晶体学角度对称地连接。 V形槽构造成支撑光纤,端面被推向机械塞子,而纤芯中心与悬臂构件的自由端对齐。

著录项

  • 公开/公告号US2020225429A1

    专利类型

  • 公开/公告日2020-07-16

    原文格式PDF

  • 申请/专利权人 INPHI CORPORATION;

    申请/专利号US201916245076

  • 发明设计人 RADHAKRISHNAN L. NAGARAJAN;MASAKI KATO;

    申请日2019-01-10

  • 分类号G02B6/43;G02B6/42;G02B6/122;

  • 国家 US

  • 入库时间 2022-08-21 11:25:39

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