Silicon-based light emitter for use in photonic crystal structure for laterally radiating light, has silicon dioxide-layer provided on substrate, where emitter radiates light that is coupled into wave guide by resonator structure

摘要

The emitter has a front-sided metal contact (10), a dielectric protection layer (9), and a luminescence center (8) including a silicon dioxide-layer (2) provided on a silicon-on-insulator substrate, where the emitter radiates a light laterally. The light is coupled into a wave guide (13) by evanescent field coupling or by a resonator structure, where the emitter is processed on a silicon-on-insulator. The silicon dioxide layer is utilized as a slot-wave guide. A cavity (4) is etched with vertical walls in an upper silicon layer (1) of the substrate.