METHOD FOR PROVIDING A MAGNETIC ROTARY SENSOR ENABLED BY SPIN-ORBIT TORQUE AND SPIN CURRENT

摘要

In example embodiments, a SOT-based magnetic rotary position sensor includes two spin Hall anomalous Hall effect (SHAHE) sensors, two spin Hall magnetoresistance (SMR) sensors or two unidirectional spin Hall magnetoresistance (USMR) sensors. In embodiments using SHAHE sensors, the sensors may be structured as Hall crosses formed from a film stack including a FM/heavy metal (HM) bi-layer or other SOT-generating layers. The current axes of the Hall crosses are orthogonally aligned. In embodiments using SMR or USMR sensors, the sensors may be structured as Wheatstone bridges including four SMR or USMR sensing elements each formed from a film stack including a FM/HM bi-layer or other SOT-generating layers. The field sensing axes of the Wheatstone bridges are orthogonally aligned.