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FERROELECTRIC FIELD EFFECT TRANSISTORS (FEFETS) HAVING AMBIPOLAR CHANNELS

机译:具有两极通道的铁电场效应晶体管(FEFET)

摘要

Ferroelectric field effect transistors (FeFETs) having ambipolar channels are described. In an example, an integrated circuit structure includes a channel layer above a substrate. The channel layer is composed of an ambipolar material. A ferroelectric oxide material is above the channel layer. A gate electrode is on the ferroelectric oxide material, the gate electrode having a first side and a second side opposite the first side. A first source/drain region is at the first side of the gate electrode, and a second source/drain region is at the second side of the gate electrode.
机译:描述了具有双极性沟道的铁电场效应晶体管(FeFET)。在一个示例中,集成电路结构包括在衬底上方的沟道层。沟道层由双极性材料组成。铁电氧化物材料在沟道层上方。栅电极在铁电氧化物材料上,该栅电极具有第一侧和与第一侧相对的第二侧。第一源/漏区在栅电极的第一侧,并且第二源/漏区在栅电极的第二侧。

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