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Microelectromechanical transducer with thin-membrane for high pressures, method of manufacturing the same and system including the microelectromechanical transducer
Microelectromechanical transducer with thin-membrane for high pressures, method of manufacturing the same and system including the microelectromechanical transducer
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机译:具有用于高压的薄膜的微机电换能器,其制造方法和包括该微机电换能器的系统
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摘要
Microelectromechanical transducer comprising a semiconductor body, four cavities buried within the semiconductor body and four membranes, each membrane being suspended over a respective cavity and being capable of being deflected by the action of a pressure external to the microelectromechanical transducer; the microelectromechanical transducer further comprising four transducer elements housed by a respective membrane and electrically coupled to one another in a Wheatstone bridge configuration to convert said external pressure into an electrical signal.
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