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MICROELECTROMECHANICAL TRANSDUCER WITH THIN-MEMBRANE FOR HIGH PRESSURES, METHOD OF MANUFACTURING THE SAME AND SYSTEM INCLUDING THE MICROELECTROMECHANICAL TRANSDUCER
MICROELECTROMECHANICAL TRANSDUCER WITH THIN-MEMBRANE FOR HIGH PRESSURES, METHOD OF MANUFACTURING THE SAME AND SYSTEM INCLUDING THE MICROELECTROMECHANICAL TRANSDUCER
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机译:具有高压的薄膜微机电传感器,其制造方法和包含微机电传感器的系统
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摘要
Microelectromechanical transducer (1; 11) comprising a semiconductor body (2), four cavities (4a-4d) buried within the semiconductor body (2) and four membranes (5a-5d), each membrane (5a-5d) being suspended over a respective cavity (4a-4d) and being capable of being deflected by the action of a pressure external to the microelectromechanical transducer (1; 11); the microelectromechanical transducer (1; 11) further comprising four transducer elements (6a-6d; 16a-16d) housed by a respective membrane (5a-5d) and electrically coupled to one another in a Wheatstone bridge configuration to convert said external pressure into an electrical signal.
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